We provide advanced magnetic solutions for the semiconductor industry, from wafer processing to packaging and test/measurement.
Our proprietary technologies support 300mm wafer transitions, complex metallization, and precise magnetic thin film alignment—critical for M-RAM development. We enable ferrofluidic sealing, enhance sputtering efficiency with patented magnetron designs, and optimize thin film alignment using specialized magnetic frames and dipoles.
For packaging, we offer high-performance motors for wire bonding and torque couplings for vacuum systems. Our permanent and electromagnetic solutions also support wafer inspection and test equipment.
Physical Vapor Deposition
Magnetic are critical in Sputtering Magnetrons and Wafer handling
Dexter’s Solutions:
- High-strength magnets for sputtering targets to improve deposition rates and uniformity.
- Magnetic field control systems to enhance film quality and thickness uniformity.
- Magnetron Design for High Target Utilization
- Repeatable – Quality systems that support “Copy Exact”
- Clean Assembly and Packaging
- Magnetic rotors and couplings for vacuum wafer handling
Chemical Vapor Deposition
Magnets are used for Inductively Coupled, Plasma Enhanced Chemical Vapor Deposition and Wafer Handling
Dexter’s Solutions:
- Magnetic confinement systems for plasma generation and control during CVD processes.
- Magnetic driven mixing systems to improve gas flow and reactant distribution within the deposition chamber.
- Magnetic couplings for vacuum wafer handling
Etching
Magnetic assemblies for plasma control and confinement and Wafer handling
Dexter’s Solutions:
- Permanent and Electromagnet Solutions
- Hermetic sealing for vacuum
Lithography
Magnetic assemblies for low inertia movers and linear motor arrays, reticle and wafer stepper systems, and gas mixing in excimer lasers
Dexter’s Solutions:
- Hermetic sealing for vacuum and hydrogen environments
- Magnetic assemblies for levitation stages to support and position photomasks with high accuracy
- Canned rotor assemblies or magnetic couplings for excimer laser light sources
Ion Implant
Permanent magnets are used in Flag Faradays, Electromagnets are key components for Beam Focusing and Beam Bending
Dexter’s Solutions:
- Magnetic mass analyzers for beamline systems to select and control ion energies.
- Magnetic beam deflectors to steer ion beams precisely onto target areas of semiconductor wafers.
Testing and metrology
Permanent magnets, electromagnets and hybrid magnets are commonly used for Scanning Electron Microscope (SEM) magnetic lens.
Dexter’s Solutions:
- Electromagnetic lenses for electron beam lithography systems, enabling precise focusing and imaging.
- Magnetic field generators for magneto-optical Kerr effect (MOKE) measurements to study magnetic properties of materials.
- Magnetic resonance imaging (MRI) systems for non-destructive testing of semiconductor structures and materials.
Recording Media
- Magnetrons
- Bulk Erase Tools-
- Disk Erase Tools
Recording Heads
- Magnetrons
- Wafer Bias Magnets-
- Wafer Initialization
- HGA Head Setters
- Wafer Plating Magnets
Additional Magnetic Technologies
- Magnetic Couplings – Wafer Handling
- Hermetically Sealed Magnets for Rotary and Linear Motors
- Magnetic Sensors
- Vacuum Pressure
- Mass Spectrometers