Semiconductor Innovation with Magnetic Technology

August 4, 2024

Magnetic technology is vital in semiconductor production. Developers weigh the trade-offs between permanent magnets, electromagnets, and hybrid solutions. This article reviews the application and benefits of magnetic innovation in key semiconductor equipment.

 Physical Vapor Deposition (PVD)

Application of Magnets:

  • Magnetron Sputtering: Permanent magnets create a magnetic field that traps electrons near the target material, enhancing ionization efficiency and deposition rate.

Advantages:

  • Permanent Magnets: Provide a stable magnetic field without external power, reducing energy consumption and heat generation, and ensuring consistency during the sputtering process.
  • Electromagnets: Offer adjustable magnetic field strength, optimizing target utilization and control over the deposition process. However, they require cooling, additional power, and pose risks from power source variations.

Chemical Vapor Deposition (CVD)

Application of Magnets:

  • Plasma-Enhanced CVD (PECVD): Electromagnets generate and control plasma, enhancing the deposition process by confining and sustaining the plasma.

Advantages:

  • Electromagnets: Provide precise control over magnetic field strength and direction, crucial for maintaining desired plasma conditions.

Ion Implanter Equipment

Application of Magnets:

  • Ion Beam Steering and Focusing: Permanent magnets and electromagnets are used to steer and focus ion beams, with electromagnets providing dynamic control and permanent magnets used for static beam shaping and performance monitoring.

Advantages:

  • Permanent Magnets: Ensure stable beam guidance and consistent monitoring.
  • Electromagnets: Enable dynamic adjustments for precision ion implantation.

Semiconductor Lithography Equipment

Application of Magnets:

  • Stepper/Scanner Systems: Electromagnets, combined with permanent magnets, enable precise positioning in lithography equipment, with maglev stages providing frictionless, accurate movement.

Advantages:

  • Permanent Magnets: Used in magnetic tracks for gross positioning and dipole fields for high-speed, precise, short-stroke positioning.
  • Electromagnets: Offer real-time adjustments and high precision, essential for achieving fine resolutions in semiconductor patterns.

Wafer Etch Equipment

Application of Magnets:

  • Magnetically Enhanced Reactive Ion Etching (MERIE): Permanent magnets enhance plasma density and uniformity during the etching process.

Advantages:

  • Permanent Magnets: Ensure consistent plasma conditions without additional power.
  • Electromagnets: Provide adjustable magnetic fields for flexible plasma control (less common in this application).

Semiconductor Metrology

Application of Magnets:

  • Magnetic Levitation Systems: Achieve contactless, highly accurate wafer positioning.
  • Magnetic Sensors: Detect and measure magnetic fields for precise metrology.
  • Magnetic Lens: Focus and deflect moving charged particles in devices like SEM.
  • Testing Magnetic Thin Films: Utilize the magneto-optic Kerr effect for investigating magnetization structures.

Advantages:

  • Permanent Magnets: Offer stability and consistency in measurement systems.
  • Electromagnets: Provide flexibility, fine-tuning, and frequency range testing capabilities.

    Conclusion

    Magnetic technology is integral to the advancement and precision of semiconductor production, from ion implanters and lithography equipment to etching and metrology systems. The strategic use of permanent magnets and electromagnets offers a range of benefits, including energy efficiency, dynamic control, and precise positioning, which are crucial for achieving optimal performance in semiconductor manufacturing.

    Discover how we can help you harness the power of magnetic technology for your production needs.